Ceramic chiller/heater

  • 24-Oct-2013 11:07 EDT
Heater-Chiller.jpg

Durex Industries’ Chiller Technology-based aluminum nitride (AlN) ceramic heater with an embedded tungsten RTD (resistance temperature detector) sensor can heat from 100° to 450°C at 200°C/s, as well as cool from 450° to 100°C at 100°C/s. This performance is based on the firm’s multilayer monolithic ceramic technology that may include heaters, cooling microfluidic, RTD sensors, ground planes, and other layers. The high thermal conductivity and low temperature expansion properties of AlN enable the fast temperature response. Applications for fast heat/cool chillers are common in semiconductor equipment and analytical instrumentation.

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