Excimer laser mirrors

  • 11-Apr-2013 04:16 EDT
LL-DeepUV-Excimer-Mirrors FINAL.jpg

Newport Corp.’s long-lived, deep ultraviolet (UV) excimer laser mirrors have projected lifetimes greater than 30 billion pulses when used in the proper photocontamination-controlled environment. The mirrors feature all-dielectric, high-reflector coatings to minimize absorption and maximize reflected energy at 193 nm. The high-energy laser mirrors are designed with excimer-grade UV fused silica substrates that are polished to better than λ/10 flatness and 10-5 surface quality to preserve wavefront quality and maintain excellent stability. Coating and testing are done in a photocontamination-controlled deep UV cleanroom that has been qualified to 193-nm standards.

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